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集散控制系統(tǒng)（Distributed Control System－DCS）集計(jì)算機(jī)技術(shù)、控制技術(shù)、通信技術(shù)、CRT技術(shù)于一體，廣泛應(yīng)用于生產(chǎn)過(guò)程控制系統(tǒng)。隨著計(jì)算機(jī)和網(wǎng)絡(luò)技術(shù)的飛速發(fā)展，產(chǎn)生了一種新型的控制系統(tǒng)———現(xiàn)場(chǎng)總線控制系統(tǒng)（Fieldbus Control System－FCS）。但國(guó)內(nèi)生產(chǎn)企業(yè)的情況是：大多數(shù)企業(yè)還處于模擬儀表和人工控制的階段，采用DCS控制系統(tǒng)的企業(yè)仍是少數(shù)。由于DCS應(yīng)用廣泛、技術(shù)成熟，在現(xiàn)有的技術(shù)條件和市場(chǎng)條件下，F(xiàn)CS還不能完全取代DCS，而且目前現(xiàn)場(chǎng)總線設(shè)備和系統(tǒng)還十分昂貴。因此，除了新建企業(yè)外，國(guó)內(nèi)企業(yè)在較長(zhǎng)時(shí)間不可能全面采用現(xiàn)場(chǎng)總線技術(shù)，而必須走逐步發(fā)展、過(guò)渡的道路。 ??我們?cè)谏虾Ｊ煞莨经h(huán)保部水質(zhì)凈化廠監(jiān)控系統(tǒng)的改造項(xiàng)目中，對(duì)3個(gè)生產(chǎn)單元已有的DCS和PLC進(jìn)行改造，增加通信功能，實(shí)現(xiàn)總調(diào)度室對(duì)各生產(chǎn)裝置的集中監(jiān)控。 2?系統(tǒng)改造方案?? 根據(jù)水質(zhì)凈化廠各生產(chǎn)單元的功能和建設(shè)階段，分為廠外調(diào)節(jié)池、污水一段、氧化溝、四期污水處理、污泥脫水、污泥干化6個(gè)生產(chǎn)單元。另外，在廠部設(shè)有總調(diào)度室，但是總調(diào)度室的監(jiān)控水平較為落后，改造之前基本上不能對(duì)各個(gè)生產(chǎn)單元進(jìn)行監(jiān)控。為了適應(yīng)生產(chǎn)需要，提高生產(chǎn)效率，改善操作條件，加強(qiáng)監(jiān)控手段，確保各生產(chǎn)裝置的正常運(yùn)行，急需對(duì)各生產(chǎn)單元和總調(diào)度室進(jìn)行技術(shù)和設(shè)備的更新改造，從而能在總調(diào)度室對(duì)各裝置進(jìn)行監(jiān)視管理，及時(shí)了解各裝置的運(yùn)行情況，達(dá)到指揮及時(shí)和調(diào)度準(zhǔn)確的目的。 2．1?現(xiàn)場(chǎng)監(jiān)控系統(tǒng)的改造 ??現(xiàn)場(chǎng)監(jiān)控系統(tǒng)的改造要充分利用原有儀表和設(shè)備，主要考慮可靠性和實(shí)時(shí)性。首先對(duì)自控程度較高的3個(gè)單元進(jìn)行改造（系統(tǒng)結(jié)構(gòu)見(jiàn)圖2—1）： ??四期污水處理生產(chǎn)單元控制設(shè)備配置了兩套ALLEN－BRADELY公司PLC設(shè)備。25塊開(kāi)關(guān)量輸入信號(hào)卡，可采集384點(diǎn)信號(hào)；7塊開(kāi)關(guān)量輸出信號(hào)卡，可輸出112點(diǎn)信號(hào)；3塊模擬量輸入信號(hào)卡，可采集24點(diǎn)信號(hào)。兩套AB—PLC通過(guò)DH＋（數(shù)據(jù)高速通道）實(shí)現(xiàn)數(shù)據(jù)共享。在原有的現(xiàn)場(chǎng)控制計(jì)算機(jī)上分別增加以太網(wǎng)卡，通過(guò)以太網(wǎng)將實(shí)時(shí)數(shù)據(jù)送到總調(diào)度室處理。??輸出192點(diǎn)信號(hào)；1塊模擬量輸入信號(hào)卡，可采集8點(diǎn)信號(hào)。系統(tǒng)運(yùn)行采用遙控開(kāi)關(guān)操作與全模擬流程盤(pán)顯示。在原有的Siemens S5－115UPLC上增加RS－232通訊模塊（CP524）和1臺(tái)現(xiàn)場(chǎng)操作站，用點(diǎn)對(duì)點(diǎn)方法連接，使PLC的數(shù)據(jù)通過(guò)現(xiàn)場(chǎng)操作站送到以太網(wǎng)上，與總調(diào)度室監(jiān)控計(jì)算機(jī)通信。但RS－232傳輸速率只有9600bps，操作站僅對(duì)現(xiàn)場(chǎng)起到監(jiān)視作用。
6141 HORIBA-STEC MFC UR-7340 AUTO PRESSURE REGULATOR UR-7340MC22275 MKS HEATER BASE STATION 4700-0001
22314 VARIAN 90 TOP OUTLET E17314640
22315 VARIAN 90 TOP INLET E17302410
22294 VARIAN BOTTOM END LINER E17314630
4503 PANASONIC SERVO MOTOR WITH GEAR HEAD MSM012A1F
5930 KAIJO CORPORATION 5341I CLIMPULSE ULTRASONIC GENERATOR 400-28F
9129 APPLIED MATERIALS TUBE, FLANGED, HEATER LIFT BEARING, BESC 0021-22011
833 SUPER VEXTA 5-PHASE DRIVER UDX5107-A3
10440 EUTECH INSTRUMENTS PH/MV/CONDUCTIVITY/C/F METER PC 2700
12239 VERIFLO UHP DIAPHRAGM VALVE HIGH FLOW MANF, P/N: 45300401 955Y3NC/NCFSFFFB
6139 UNIT MFC MULTI FLO 8161 UFC-8161
23765 ADVANCED ENERGY RF GEN, MDX-L12, 0190-76007, AE-A-146 3152313-000C
11610 COSEL 5V/5A 24V/9A POWER SUPPLY LEB225F-0524
16937 EATON/CUTLER-HAMMER ASSY COVER PROTECTIVE SNSR 0020-31732
7832 APPLIED MATERIALS ENDURA ASSY 101 WAFER LIFT 0010-70271
11765 LAM RESEARCH GAUGE CABLE, 1.1M 684-097837-001
21340 LAM RESEARCH WELDMENT PIN 715-076956-002
20776 OLYMPUS PCB ASSY, PEPS-SNS, SQ5800 DV239800-01
1050 SUPERIOR ELECTRIC STABILINE POWER QUALITY INTERFACE PQI-3120H
21830 MITSUBISHI AC SERVO MOTOR W/ GEARHEAD HC-KFS13BK-S9
1627 NEMIC-LAMBDA SWITCHING POWER SUPPY, 100-120VAC 3.2A 50/60HZ HK150A-5/A
20341 CCSI PCB NETWORK STANDARD I/F MOD PCB71600-00B SB871600-00A STD20-CXS
21015 APPLIED MATERIALS CABLE ASSY DNET HUB TO MFC5 CH-Y EPI 3 0150-47457
8620 POWER ARCHITECTS POWER SUPPLY PA-1085
2687 OMRON CPU11 PROGMABLE CTLR CPU UNIT W/ PA203 OCH & OC222
23049 YASKAWA ELE AC SERVO MTR W/ NEUGART PLE 40, 2070048 SGMAH-01A1F-AP51
7977 DAINIPPON SCREEN MAIN I/O BOX CONTROLLER HEME-6031 AP-1985A-S HEMH-503B1
7355 BEI TECHNOLOGIES LOAD ROBOT ENCODER PN:9 E25BB-4R-SB-CCW-8CC-7406R-LED-ED25
2085 NEMIC-LAMBDA POWER SUPPLY, 0-10V 0-2.0A ZUP10-20
1338 ORIENTAL MOTOR BRUSHLESS DC MOTOR DRIVER FBLD75A
13080 EDWARDS FORELINE TRAP, P/N: A13305000 FL20K
15731 LAM RESEARCH PCB, VME BREAKOUT BOARD ASSY 810-800082-201
2778 ASYST RETICLE HOLDER-RETICLE POD, SINGLE, 4001-5038-06 4001-6746-02
19707 ASML MAXON DC MOTOR 4022.456.4448
4145 SYSTEM BASE MULTI-8/PCI DRIVER PANEL RS232 P-8/232
12733 YAMADA CORPORATION AIR POWERED DOUBLE DIAPHRAGM AODD PUMP NDP-5FPT
7773 GE FANUC PCB 605-048878-001 FLASH V0.1 350-00007671-421000 VME-7671-421000
22488 BROOKS ASSY, CABLE, DB44HDM-DB44HDF, 50' 8CH SERIAL 002-4042-06
6396 AERA MFC FC-DN781C FC-DN781C-BA
1394 IWAKI BELLOWS PUMP SBU-3T-ME4
16563 OEM PCB, SAT 7278-3 W/ BLM21-01 BOARD 83105-210-01
14577 ANALYTICAL TECHNOLOGY MONITOR MODULE, % O2, 10-15VDC 0.3A A/R
7053 POLYSPEDE ADJUSTABLE SPEED DRIVE SYSTEM W/ MANUAL PRD2-16
19202 MCG BRUSHLESS SERVO AMPLIFIER, BMC12H-INV B25A40ACK-MC2
15543 LAM RESEARCH PCB, I/O MOTHERBOARD, ESC 810-17001-1
11139 ANELVA VALVE, V SERIES, TYPE-L V-040LV-MMI
21542 APPLIED MATERIALS LINE, EXHAUST HTF CHAM. A/B, MF 0050-14805
21553 TERADYNE PCB, TGMOD 151E, TW823 950-823-06
2643 SPAN GAS CYLINDER SCALE AMPLIFIER SAM-305
3896 GRANVILLE-PHILLIPS TUNGSTEN FILAMENT FOR MICRON ION GAUGE 354003-TD
1841 CHROMALOX 1/4 DIN TEMPERATURE CONTROLLER 2001-702J1
9290 CHUO SEIKI STAGE LINEAR POSITIONER LS-612
20519 DELTA TAU PCB, UMAC AC POWER SUPPLY, 603269-105, LFVLT130-4102 ACC-E1
8102 TOKYO ELECTRON PCB ALPHA 8S VERTICAL FURNACE 118100025518 MC-31042A
16115 APPLIED MATERIALS HOSE 165, INSULATED, SWAGELOK SS-6BHT-36 0190-35464
18256 OLYMPUS MDPLAN 10 MICROSCOPE OBJECTIVE LENS, 0.25, INFINITY/- F=180 IC10
19663 APPLIED MATERIALS INSUL PLIS/EPLIS FINAL VALVE UPPER EASY 3420-01118
10178 NEC VIBRATION ISOLATION MOUNT (L20CMxW9.5CMxH8.5CM)
16278 APPLIED MATERIALS ASSY, RF FILTER BOX PRODUCER SE W/ 0150-06867 0090-04947
11765 LAM RESEARCH GAUGE CABLE, 1.1M 684-097837-001
1216 MITSUBISHI MELSEC PROGRAMMABLE CONTROLLER FXON-24MR-ES/UL
9276 VERIFLO 3-WAY REGULATOR VALVE IR401W3PVITS4TS
19438 SYMBOL LASER BARCODE SCANNER, SP8882-5614 LS-1220-I322A
21849 SANYO DENKI AC SERVO MOTOR BL SUPER P3, AMAT 0190-15759 P30B04010DXS1CM
15493 HUB CITY RIGHT ANGLE BEVEL SPEED REDUCER, 0221-14406 AD4 1/1 A
2260 APPLIED MATERIALS DIA VLV MAX IN 125 PSI P/N: 944AOPLPNCSFSFF 3870-01306
16726 APPLIED MATERIALS FLOW SENSOR C/A, A/C/E POS, CHAMBER H 0150-00882
19128 APPLIED MATERIALS LIFT PIN FIXED 200/300MM 2-00000103-334 0200-02575
16123 APPLIED MATERIALS LINE,UPPER EXHAUST WXP CHMBR D 0050-76670
15457 HOKUYO SCANNING INFRARED LED OBSTACLE DETECTION SENSOR PBS-03RN
14969 CLIPPARD 8-PORT ELECTRONIC PNEUMATIC MANIFOLD BOARD PCB EMC-08
15215 APPLIED MATERIALS MANIFOLD CLEAN GAS 200MM PRODUCER 0021-04297
16729 APPLIED MATERIALS CABLE ASSY, EMO INTERCONNECT,25M 0150-16006
16465 APPLIED MATERIALS TURCK CABLE ASSY CHX GP PNEU 0150-24602
16466 APPLIED MATERIALS TURCK CABLE ASSY CHY GP PNEU 0150-24599
17923 TEC PCB, PWB-PSU-TRN-M2 6LG01991000
17924 TEC PCB, PWB-PSU-TRN-M1 6LG01990000
18616 LAM RESEARCH RF COAXIAL CABLE, 1.5M 853-025918-005
22332 NOVELLUS MOTOR MOUNT 15-11193-00
15852 APPLIED PRECISION FLOWPOINT NANOVALVE CONTROLLER 52-504254-011
4512 PALL FLTR IN-LN GAS 3000PSIG 1/4-GSKT SEAL M GLFPF3000VMM4AM
2856 ENI IMPEDANCE MATCH NETWORK PN:MWH-100-01M6 MWH-100
11667 FUJIKIN 3-WAY VALVE FPR-SDTB-71-6.35-3
B32 NEMIC-LAMBDA POWER SUPPLY EWS25-5
6388 HORIBA-STEC MFC SEC-Z10DW (0190-16748) SEC-Z12DWM
7215 STI MINISAFE-B LIGHT CURTAIN TRANSMITTER 24 (610MM) PN:42687-0240 MS4324BX
11038 IEI 3.5" INTEL ULV CELERON 400 CPU BOARD WAFER-9371A-R10-RSC
15852 APPLIED PRECISION FLOWPOINT NANOVALVE CONTROLLER 52-504254-011
4512 PALL FLTR IN-LN GAS 3000PSIG 1/4-GSKT SEAL M GLFPF3000VMM4AM
2856 ENI IMPEDANCE MATCH NETWORK PN:MWH-100-01M6 MWH-100
11648 BOSTON GEAR 700 SERIES WORM GEAR SPEED REDUCER, 20:1, 0.870HP 718-20-G
6388 HORIBA-STEC MFC SEC-Z10DW (0190-16748) SEC-Z12DWM
7215 STI MINISAFE-B LIGHT CURTAIN TRANSMITTER 24 (610MM) PN:42687-0240 MS4324BX
11315 E+H METROLOGY INTERFACE MODULE, CONTROL UNIT B215, B187, B218 1737
14240 VAT SLIT GATE VALVE 201917
11899 KOLLMORGEN-BOBRY SERVO MOTOR, 0.43KW DBL2H00080-03M-000-S40
2245 WAHL DIGITAL HEAT-PROBER THERMOMETER PLATINUM 392MXD 392MX
5664 GE FANUC PWR SUPPLY PLC 11 SLOTS ASSY MODULE IC693PWR3215
22068 SANYO DENKI 1.2° STEP MOTOR W/ GEARHEAD 103H5332-0342
21031 ONEAC POWER CONDITIONER, OUTPUT 120V, PN: 011-000 CB1115
12058 SICK DIFFUSE PHOTOELECTRIC SENSOR WT2S-P131
2443 APPLIED MATERIALS MTR ASSY CVD LIFTS W/ SHAFT 0090-09027
427 COSEL AC/DC PFC POWER SUPPLY AC100-240V 50-60HZ 2A PAA150F-5
832 SUMITOMO MOTOR CONTROLLER MSE-15C-DU-S200/D
4661 SMC SOLENOID VALVE 0.2-0.7 Mpa SY5340-5LOZD
4486 SCHAFFNER HIGH POWER FILTER, 3-PHASE 16A INPUT FN351-16-29
894 DAYTRONIC DUAL DC VOLTAGE CONTROLLER SERIES 4062
8395 OEM LAMP MUL-250HS
7475 APPLIED MATERIALS COAX CABLE, DXZ COUNTERMATCH, 2.7M 0150-76322
9796 PANASONIC AC SERVO DRIVER 400W DV88040LDMB
5137 APPLIED MATERIALS MODULE MFG. HYBRID MATCH ETCH RF MATCH 0010-12088
22415 AXCELIS V3 ACTUATOR BELLOW (ENDSTATION) 1907830
B49 TYLAN GENERAL CDG ADAPTER UNIT HPC-20(HI-TEMP)
19727 BAUMER RETRO-REFLECTIVE LASER SENSOR OPDM 16P51/403591
11127 APPLIED MATERIALS CABLE ASSY, POWER, 15FT 0150-35966
13223 TOKYO ELECTRON PCB, SYSTEM OPERATION CONTROL BD, 281-600680-9 208-600680-3
144 TOKYO ELECTRON PCB SYSTEM I/O 2, 1808-022002-1 1881-022002-11
17631 SEIKO SEIKI PCB, RELAY INTERFACE BOARD P019Y---Z856-3RB
2038 WATKINS-JOHNSON PCB LIQUID SOURCE I/O BOARD, 903172-001 PWB 903171-001
17048 ADVANTEST PCB ASSY W/ OMRON H3Y-4 & MYQ4 BLD-016539
9223 SMC RODLESS CYLINDER MAX PRESS 0.7 MPA CDY1S10H-250
3209 FUJI SEIKI RIGHT ANGLE VALVE, 000205 1222101
12315 CKD PNEUMATIC AIR CYCLINDER, 0.1 ~ 1.0 MPA SCM-40B170-Q
9748 APPLIED MATERIALS CABLE FILAMENT CONTROL 50FT 0620-01281
9309 DAINIPPON SCREEN I/O MODULE (16/16) SN-2016-TRDS DS-1211-ANALOG
1330 LEYBOLD TURBO VACUUM PUMP, TURBOVAC 50 85402
16301 DYNAX HANDY TERMINAL, ROBOT TEACH PENDANT RT1-K3AX-080
18848 APPLIED MATERIALS PLATE, REFLECTOR, CHMBR BOTTOM, 23CM 0021-35163
13578 BECKHOFF SERVO MOTOR W/ AG2250 ANGLED PLANETARY GEAR AM8022-0D10-0000
8779 MITSUBISHI P91 VIDEO COPY PROCESSOR ULTRASOUND PRINTER P91W
7180 APPLIED MATERIALS FORGED 8 DXZ HEATER, HI-TEMP CERAMIC HEATER 0040-39240
17756 APPLIED MATERIALS E84 PI/O AGV/RGV HOKUYO DMS-HB1-V 0190-02688
8464 APPLIED MATERIALS ARM, WELDMENT SOURCE STD OBSOLETE 0040-20006
17047 MATSUSHITA TYPE FC-35 GREEN POWER MAGNETIC CONTACTOR BMF6-35-2
20939 APPLIED MATERIALS CABLE ASSY 0150-46754
6331 FUJIKIN MFC FCS-WR FCSWR-4WS-798-F400#D
8744 AG ASSOCIATES SIX GAS INTERLOCK 7100-5425-03
7370 LAM RESEARCH OUTER 17" SILICON ELECTRODE ASSEMBLY 839-020965-020
6190 FUJIKIN MFC FCS-WR FCSWR-4WS-798-F850#B
6383 FUJIKIN MFC FCS-WR FCSWR-4WS-798-F400#B
2623 APPLIED MATERIALS COOLED TUBE, LEAP2 0040-02238
9238 PANASONIC AC SERVO DRIVER MSD011A1X05
20916 APPLIED MATERIALS HARNESS ASSY CIOC TO GP TRANSDUCER 0140-80010
3540 ALLEN-BRADLEY 8-POINT DISCRETE I/O SIMULATOR MODULE 1771-SIM
20876 MATROX PCB ASSY W/ GSP MODULE 0298-06-05, P/N: PG-641, 0296-06-04 PG-1281
7847 DAINIPPON SCREEN EMERGENCY OFF SWITCH BOX 3 HEPT-003
21397 APPLIED MATERIALS ISOLATOR PUMPING RING TOP 200MM PRODUCER 0200-00402
1395 EDWARDS VACCUM PUMP RV12 A655-01-905
4138 DIGITAL ELECTRONICS DC POWER SUPPLY HIGH VOLTAGE DRP-9303DU
18091 YASKAWA MINERTIA SERVO MOTOR, RM SERIES, UTOP1-020MX UGRMEM-01SAKOE
11211 TOKYO ELECTRON PCB, I/O MDIF5B BOARD, 2184-020931-12 TTLM02-11
3239 YAMAMOTO MANOSTAR DIFFERENTIAL PRESSURE SWITCH MS61AHV1.2E-K
3891 VAT GATE VALVE 02109-BA24-ATU1
4712 EMERSON SERVO MOTOR 960104-23 MGE-205-CONS-0000
7475 APPLIED MATERIALS COAX CABLE, DXZ COUNTERMATCH, 2.7M 0150-76322
3435 SUPER VEXTA 5-PHASE-DRIVER UDX5107-G4-2
20597 ADVANTECH PCB, BACKPLANE BOARD, 190K610620 PCA-6106P4
15504 MILLIPORE 22" ION-EX CARTRIDGE CPMB02202
10056 APPLIED MATERIALS CB MAG THERM 3P 240VAC 30A BOLT-ON QO 0680-01215
20153 APPLIED MATERIALS CABLE ASSY,SQS(M)R/A TO SQS(M)STR.W/INTL 0190-21843
4424 APPLIED MATERIALS HDPCVD ESC, 300MM DUAL HE 0040-48594
12520 CTC ANALYTICS MOUNT/BRACKET FOR FAST WASH STATION MR03-00B
8164 SMC PNEUALPHA SOLENOID VALVE ECC-PNAL-6MR-A
14022 USHIO UNI METER UIT-101
22171 OEM 24'' COREFLEX FOR PRODUCER WATER LINE S-COR SS-SC6PF6PF6-24
8395 OEM LAMP MUL-250HS
6040 HORIBA-STEC MFC SEC-E440 MASS FLOW CONTROLLER SEC-E440J
9042 APPLIED MATERIALS MOTOR CURRENT AMP-FILTER CMP (0100-01654)0010-17634
1386 TELEDYNE VACUUM GAUGE TUBE DV-6M-VCR
10391 APPLIED MATERIALS FLANGE, EDWARDS PUMP, CVD EXH SW 0040-21826
15333 ZEISS 960 S.E.M PCB, 348338-2002 348338-9020-2002
T56 MKS VACUUM SWITCH TYPE 141, 1 TORR 141A-22945
2388 WAHL PLATINUM-RTD DIGITAL HEAT-PROBER THERMOMETER 392MVX
12341 ADVANCED ENERGY RF NAVIGATOR RF MATCH 3155126-012
8003 NOR-CAL PNEUMATIC ISOLATION VALVE, KLA-TENCOR ES20XP 990322-2
23385 COMPUTER PRODUCTS POWER SUPPLY FOR FSI XL200-3602/4602
9748 APPLIED MATERIALS CABLE FILAMENT CONTROL 50FT 0620-01281
22186 AXCELIS SOURCE SPACER 170115590
21951 AXCELIS RESOLVER LEAD BACKED PLATE, 10" X 10" 1180750
4793 NEC TFT LCD SCREEN DISPLAY PANEL NL6448BC33-46
3931 VAT ANGLE VALVE 26324-KA41-0001
11783 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000570-11 MC-31151M
14658 RDP TRANSDUCER AMPLIFIER S7AC
22171 OEM 24'' COREFLEX FOR PRODUCER WATER LINE S-COR SS-SC6PF6PF6-24
7568 APPLIED MATERIALS RING CNTRLLC LID 0020-70184
6040 HORIBA-STEC MFC SEC-E440 MASS FLOW CONTROLLER SEC-E440J
12859 PITTMAN SERVO GEAR MOTOR, 24VDC, RATIO 19.7:1, P/N: 12-8882-120 GM9413L144
10391 APPLIED MATERIALS FLANGE, EDWARDS PUMP, CVD EXH SW 0040-21826
3494 NSK ESA SERVO DRIVER ESA-Y3040A25-11
15333 ZEISS 960 S.E.M PCB, 348338-2002 348338-9020-2002
T56 MKS VACUUM SWITCH TYPE 141, 1 TORR 141A-22945
12341 ADVANCED ENERGY RF NAVIGATOR RF MATCH 3155126-012
8003 NOR-CAL PNEUMATIC ISOLATION VALVE, KLA-TENCOR ES20XP 990322-2
11758 AXCELIS LASER ASSY, 334590 01 01 1165740
11818 LS PLC, 16 POINTS RELAY OUTPUT MODULE G6Q-RY2B
7201 EBARA VACUUM PUMP EMERGENCY OFF SWITCH REMOTE A/C BOX 211618
23385 COMPUTER PRODUCTS POWER SUPPLY FOR FSI XL200-3602/4602
22186 AXCELIS SOURCE SPACER 170115590
3974 TOKYO ELECTRON CONTROLLER W/ RKC DIGITAL TEMP CONTROL:REX-D400 3M87-022665
11635 BOSTON GEAR 700 SERIES GEAR SPEED REDUCER, RATIO 20:1, 0.87 H.P. F71820B5J
21951 AXCELIS RESOLVER LEAD BACKED PLATE, 10" X 10" 1180750
4793 NEC TFT LCD SCREEN DISPLAY PANEL NL6448BC33-46
12908 ECHELON PCLTA PC LONTALK ISA-BUS ADPT CARD, PN: 801-0211-01 73100-11
10610 ADVANCED ENERGY PARAMOUNT 3013 RF GENERATOR 3156320-003
11783 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000570-11 MC-31151M
11784 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000571-11 MC-31151T
11782 TOKYO ELECTRON PCB ASSY TS-4000Z-16 CONTROL UNIT, 1181-000569-11 MC-31151P
14658 RDP TRANSDUCER AMPLIFIER S7AC
17511 ALPHA MOISTURE SYSTEMS DEWPOINT METER DS1000
18772 WATKINS JOHNSON PCB, RS-232 BOARD 961122
19906 KEYENCE PROGRAMMABLE CONTROLLER KV-P16R
19904 FOXBORO 873 RESISTIVITY ANALYZER 873RS-JIPCGZ
8298 A TO Z ELECS PCB MOD SEMVISION CX 300MM OPAL S2DIO
10719 ASML CARBON FILTER 4022.454.5626
4758 PRECISION SENSORS ABSOLUTE PRESSURE SWITCH E36W-H52
17408 LAM RESEARCH TEMPERATURE CALIBRATION SOURCE 518-025348-001
19458 PULNIX CCD CAMERA MODULE TM-7AS
243 EDWARDS EXDC 80 TURBO MOLECULAR PUMP CONTROLLER D39645000
21185 RENISHAW SENSOR OPTICAL ENCODER RGH22 X50F00
T257 MKS BARATRON PRESSURE TRANSDUCER, 10 TORR 628411TAE
2640 VARIAN PCB, DIGITAL I/O RELAY INTERFACE, E14004050 E15004050
22180 VAT MONOVAT DOOR 19X219 ANODIZED LOCKED TO 9Y4C 100404-R1
11839 MAXON MOTOR DC MOTOR W/ENCODER HEDL-5540 A11 223277
1205 SMC E/P REGULATOR IT2020-N02B0
21909 PALL ULTIKLEEN-CDS FILTER 0.05μm ABF1UFD3EH1
1800 STI MCF4200E DIN 081608 2X 2R CABLE WITH NICKEL PLATED 82322-0010
5711 TDK CORPORATION 12VDC POWER SUPPLY RM 12-12RGB
2643 SPAN GAS CYLINDER SCALE AMPLIFIER SAM-305
21184 PFEIFFER TURBO I/F TURBOMOLECULAR CTLR PM C01 713 (REFURBISHED) TC750
18918 APPLIED MATERIALS CABLE ASSY COAX RG-217/U 79FT N(M)/QDS-U 0620-02431
5742 OMEGA HANDHELD METER W/PITOT TUBE HHP 7150
6381 FUJIKIN MFC FCS FCS-4WS-798-F130#D
14182 LAM RESEARCH HOLDING BRAKE WARNER ELECTRIC, ERS-42 853-011141-003
16332 APPLIED MATERIALS INFICON HTR INLINE VLV VIP040-Z 0190-33740
16459 APPLIED MATERIALS CABLE ASSY P54 CHX INLK MANF 0150-25933
B13 PRO-FACE GRAPHIC PANEL GP370-LG11-24V
16468 APPLIED MATERIALS CABLE ASSY CH X GP DNET HUB 0150-25320
16467 APPLIED MATERIALS CABLE ASSY CH Y GP DNET HUB 0150-25322
16457 APPLIED MATERIALS CABLE ASSY P54 CHY INTK MANF 0150-25934
18931 LAM RESEARCH CABLE ASSY RF COAXIAL CABLE RIGHT 834-030819-018
9007 APPLIED MATERIALS FRAME SOURCE 13" 0020-20296
424 FINE SUNTRONIX POWER SUPPLY VSF150-24
注：聯(lián)系我時(shí)，請(qǐng)說(shuō)是在“傲立機(jī)床網(wǎng)”上看到的，謝謝！
